PARALLEL TYPE TEST SYSTEM FOR SEMICONDUCTOR DEVICE AND METHOD OF TESTING SEMICONDUCTOR DEVICE IN PARALLEL

摘要

A system and a method for testing a parallel typed semiconductor device IC are provided to increase the throughput by performing a test on DUTs in parallel at the same time. A system for testing a parallel typed semiconductor device IC(Integrated Circuit) includes a probe chuck(100), a test head(200), and a test controller(300). The probe chuck mounts plural DUTs(Device Under Test) having different types from one another thereon. The test head provides plural circuits which are used for testing independently the DUTs having different types from one another at the same time. The test controller controls the test head and the probe chuck.