| 摘要 |
PROBLEM TO BE SOLVED: To provide a processing liquid feeder which is capable of supplying (delivering) a large amount of a processing liquid without giving impact or damage to a substrate and of preventing dripping or dropping of the processing liquid from a nozzle when feeding (delivering) of the processing liquid is stopped. SOLUTION: The processing liquid feeder feeds a rinse liquid, which is the processing liquid, to a glass substrate G held on a rotary base mount. A nozzle 33 is attached to the front end of a feed pipe 35 connected to a rinse liquid source 34, and a distribution channel 36 communicating with the feed pipe 35 is formed in the nozzle 33. In the distribution channel 36 of the nozzle 33, a liquid retaining member 40 composed of, for example, mesh members 40a, 40b, and 40c is disposed to exert a liquid retaining force in a sectional area perpendicular to the direction of flow of the rinse liquid lead in from the feed pipe 35. This enables feeding (delivering) of a large amount of the processing liquid without giving impact or damage to the glass substrate G and prevents dripping or dropping of the processing liquid from the nozzle 33 when feeding (delivering) of the processing liquid is stopped. COPYRIGHT: (C)2008,JPO&INPIT
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