| 摘要 |
PROBLEM TO BE SOLVED: To provide a film-forming apparatus which does not make an electric current flow between a thin film having grown on a substrate and a thin film having grown on a camber prevention member even when the thin films are joined. SOLUTION: This film-forming apparatus for depositing a film-forming material on a glass substrate 1 in a vacuum comprises: a substrate holder 3 for holding the glass substrate 1; and a frame-shaped camber-prevention member 4 which is placed in the perimeter of the glass substrate 1 held by the substrate holder 3 so as to face to the substrate holder 3 with a distance of less than 10 mm. The camber prevention member 4 is in an electrically floating condition. COPYRIGHT: (C)2009,JPO&INPIT |
