| 摘要 |
<P>PROBLEM TO BE SOLVED: To adjust a frequency of an edge mode piezoelectric vibration chip effectively. <P>SOLUTION: On nearly the entire surface of a vibration region, where induced charges occur on a surface, at the side of a longitudinal end 23 at which excitation electrodes 24a, 24b of an edge mode quartz vibration chip 21 are formed, a weight section comprising metal films 28, 29, such as Au, whose mass density is larger than that of quartz is electrically separated from the excitation electrodes and pieces of wiring 26a, 26b for formation. In a quartz element piece 22, apparent mass density in the vibration region is increased by the metal film, the frequency of the quartz vibration chip 21 is allowed to fluctuate in a lower direction. The film thickness of the metal film is controlled, or the metal film is deleted partly by laser irradiation, thus adjusting the frequency without changing/deteriorating the excitation efficiency in the quartz vibration chip. The metal film is formed simultaneously with the patterning of the excitation electrode, or the like, or is formed separately from it. <P>COPYRIGHT: (C)2009,JPO&INPIT |
