| 摘要 |
PROBLEM TO BE SOLVED: To provide a scanning probe microscope capable of exciting a cantilever in its resonance frequency to observe a sample. SOLUTION: The vibration produced in an exciting piezoelectric element 22 is transmitted to a vibration transmitting wire 18 through a wire fixing stand 19. Since the vibration transmitting wire 18 is in contact with the second surface S2 (the surface on the side of a probe 8) of the cantilever 7, the vibration transmitted to the vibration transmitting wire 18 is transmitted to the cantilever 7 from the side of the second surface S2 of the cantilever 7. COPYRIGHT: (C)2009,JPO&INPIT
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