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发明名称
An operating device for an excimer lamp
摘要
申请公布号
EP1630853(B1)
申请公布日期
2008.12.17
申请号
EP20050014844
申请日期
2005.07.08
申请人
USHIODENKI KABUSHIKI KAISHA
发明人
NAKAMURA, MASAKI;YAMAMORI, KENJI
分类号
H01J65/04;G02F1/1333;H01L21/00;H05B41/28
主分类号
H01J65/04
代理机构
代理人
主权项
地址
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