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发明名称
TREATMENT DEVICE FOR WAFERS
摘要
申请公布号
EP1328965(B1)
申请公布日期
2008.12.17
申请号
EP20010988943
申请日期
2001.10.24
申请人
PAC TECH - PACKAGING TECHNOLOGIES GMBH
发明人
TEUTSCH, THORSTEN;ZAKEL, ELKE
分类号
H01L21/687;H01L21/00
主分类号
H01L21/687
代理机构
代理人
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地址
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