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发明名称
摘要
申请公布号
JP4199476(B2)
申请公布日期
2008.12.17
申请号
JP20020110485
申请日期
2002.04.12
申请人
发明人
分类号
H01L21/8238;H01L27/04;H01L21/822;H01L27/02;H01L27/06;H01L27/092;H02H3/22;H02H9/00
主分类号
H01L21/8238
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地址
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