| 摘要 |
<p>Provided is a laser irradiation device, which can perform such a position control easily as to move a band-shaped irradiation area at a high speed in the long axis direction. A rotary polygon mirror (2) is rotated at a constant speed. A timing control circuit (8) outputs, on the basis of rotational phase information (Q) from an encoder (7), a trigger (G) at an output timing varying within a predetermined time range. A laser oscillator (1) outputs a laser beam (B1) in response to the trigger (G). The rotary polygon mirror (2) may be rotated once for a time period of mirror times as long as an average time interval, at which the laser oscillator (1) outputs the laser beam (B1) in pulses, so that the rotation can be easily executed. The timing control, in which the laser beam (B1) is outputted in pulses by the laser oscillator (1), is shorter than the average time interval, but can be easily executed, because of no moving part. Thus, the position of a band-shaped irradiation area (4) can be easily moved at a high speed within the predetermined range of the band-shaped irradiation area (4) in the long axis direction. ® KIPO & WIPO 2009</p> |
