| 摘要 |
A magnetic sensor and manufacturing method thereof is provided to detect magnetism at a biaxial direction and 3 axial direction as magnetic reluctance elements are formed on the flat plane and slope. A magnetic sensor(10) comprises a substrate(11), a silicon oxide film, a plurality of magnetic reluctance elements, a plurality of lead films(12a), a chemical vapour deposition oxide film and a non-magnetic film. The silicon oxide film is formed in the top of the substrate in order to form the flat plane and slope. A plurality of magnetic reluctance elements are formed on the substrate by laminating a free layer, and a conductive layer and a pinned layer. The lead film is formed in order to serially connect a plurality of magnetic reluctance elements. The chemical vapour deposition oxide film coats a plurality of magnetic reluctance elements. The non-magnetic film coats the neighboring(periphery) of the free layer of a plurality of magnetic reluctance elements. The non-magnetic film is formed between a plurality of magnetic reluctance elements and chemical vapour deposition oxide film.
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