发明名称 Rectangular semi-conducting support for microelectronics and method for making same
摘要 The semi-conducting support comprises a graphite substrate having a front surface and a rear surface and at least a first stack arranged on the front surface of the substrate. The first stack successively comprises a single-crystal diamond layer, an electrically insulating oxide layer and a semi-conducting layer. The support can comprise a second stack arranged on the rear surface of the substrate and comprising the same succession of layers as the first stack or comprising a polymer material layer. A thermal connection passing through the first and/or second stacks and connecting the graphite substrate to an external surface of the support enables heat to be removed. The method can comprise production of the semi-conducting layer by molecular bonding of rectangular silicon strips onto the oxide layer.
申请公布号 US7466019(B2) 申请公布日期 2008.12.16
申请号 US20050667920 申请日期 2005.11.24
申请人 COMMISSARIAT A L'ENERGIE ATOMIQUE 发明人 DELEONIBUS SIMON
分类号 H01L23/06 主分类号 H01L23/06
代理机构 代理人
主权项
地址