| 摘要 |
PROBLEM TO BE SOLVED: To detect the degree of a warpage of a top board at a high detection resolving power by a simple structure while keeping a high supporting rigidity of the top board in a table system which is suitable for, e.g., an X-ray CT photographing, in which the top board for mounting an object is let out in the horizontal direction. SOLUTION: A light receiving position specifying section 125 specifies the light receiving position of a laser beam 600 which changes in response to the warpage of a base 104 by a laser light source 122 being installed on the base 104 which supports the top board 102, and a light detector 124. From the light receiving position, the degree of the warpage of the top board 102 is indirectly detected. COPYRIGHT: (C)2009,JPO&INPIT
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