| 发明名称 |
IN SITU CLEANING OF CVD SYSTEM EXHAUST |
| 摘要 |
Embodiments of the invention relate to methods and apparatus are disclosed for forming films using CVD. One or more method and apparatus embodiments include preventing the formation of bonds and/or breaking bonds that permit polymers to form in an exhaust line of a CVD apparatus. |
| 申请公布号 |
WO2007137035(A3) |
申请公布日期 |
2008.12.11 |
| 申请号 |
WO2007US68948 |
申请日期 |
2007.05.15 |
| 申请人 |
APPLIED MATERIALS, INC.;CARLSON, DAVID, K. |
发明人 |
CARLSON, DAVID, K. |
| 分类号 |
C23C16/44;C23C16/48 |
主分类号 |
C23C16/44 |
| 代理机构 |
|
代理人 |
|
| 主权项 |
|
| 地址 |
|
