| 摘要 |
PROBLEM TO BE SOLVED: To perform dressing work while holding a work without requiring an exclusive space on the dicing device side or a structural alteration and without being restricted by the work. SOLUTION: Since a frame clamp 20 has a dress member 25 on the upper surface of a frame push portion 24, it is simply required to attach an annular frame 5 holding a work 2 by means of a dicing tape 3 to a chuck table 16 as usual and since a free space above the upper surface of the frame push portion 24 is utilized, dressing work using the dress member 25 can be carried out as required without requiring an exclusive space on the dicing device or a special structural alteration. Since the dress member 25 is arranged on the upper surface at the frame push portion 24 of the frame clamp 20 arranged on the outer circumference of the chuck table 16, the work 2 can be replaced while attaching the dress member 25 without being restricted by the size of the work 2. COPYRIGHT: (C)2009,JPO&INPIT
|
