发明名称 Substrate Processing Apparatus and Mounter
摘要 The final-bonder (103) is equipped with: a warping correction unit (201) that is equipped in parallel with a backup stage (203) with a distance of about 20 mm from such backup stage (203), and that includes accordion pads (202) for sucking a liquid crystal panel; the backup stage (203) that supports, from the back, the liquid crystal panel when pressure is applied to its outer edge portion at the boding of semiconductor components; and a pressure head (204) that carries out final bonding of the semiconductor components onto the outer edge portion of the liquid crystal panel by applying pressure and heat to them.
申请公布号 US2008301932(A1) 申请公布日期 2008.12.11
申请号 US20050631518 申请日期 2005.07.01
申请人 MURATA TAKAHIKO;TSUJI SHINJIRO;ODAWARA KOZO;KATANO RYOUICHIROU 发明人 MURATA TAKAHIKO;TSUJI SHINJIRO;ODAWARA KOZO;KATANO RYOUICHIROU
分类号 B23P19/00 主分类号 B23P19/00
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