发明名称 |
Microstructure Inspecting Apparatus and Microstructure Inspecting Method |
摘要 |
Voltage is applied to a chip TP by a voltage drive unit 30 through a probe needle P to move a movable part of a microstructure. A sound produced in response to motion of the movable part of the microstructure is detected by a microphone 3. Then, the sound detected by the microphone 3 is measured by a measurement unit 25. The control unit 20 evaluates the characteristics of the tested chip TP by comparing with a sound detected from an ideal chip TP.
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申请公布号 |
US2008302185(A1) |
申请公布日期 |
2008.12.11 |
申请号 |
US20050662478 |
申请日期 |
2005.09.09 |
申请人 |
YAKABE MASAMI;MATSUMOTO TOSHIYUKI;IKEUCHI NAOKI;OKUMURA KATSUYA |
发明人 |
YAKABE MASAMI;MATSUMOTO TOSHIYUKI;IKEUCHI NAOKI;OKUMURA KATSUYA |
分类号 |
G01H1/00;B81C99/00 |
主分类号 |
G01H1/00 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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