发明名称 FLUID CONTROL APPARATUS
摘要 <p>Provided is a fluid control apparatus having a reduced number of part items and improved assembly operation efficiency. A pressure display (4), which has relatively high frequency of being removed, is connected to a base block (5) at the lower section with a male screw member (17) from above. An open/close valve (6), which has relatively low frequency of being removed, has an integrally arranged block-like main body (6a) at the lower section. The main body (6a) of the open/close valve (6) is connected to the base block (5) with a male screw member (18) from the front-rear direction.</p>
申请公布号 WO2008149702(A1) 申请公布日期 2008.12.11
申请号 WO2008JP59628 申请日期 2008.05.26
申请人 TOKYO ELECTRON LIMITED;FUJIKIN INCORPORATED;OKASE, WATARU;MORIYA, SHUJI;NAKATA, TOMOHIRO;SHINOHARA, TSUTOMU;YAMAJI, MICHIO 发明人 OKASE, WATARU;MORIYA, SHUJI;NAKATA, TOMOHIRO;SHINOHARA, TSUTOMU;YAMAJI, MICHIO
分类号 F16K27/00;C23C16/455;F17D1/04;H01L21/02 主分类号 F16K27/00
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