<p>Provided is a fluid control apparatus having a reduced number of part items and improved assembly operation efficiency. A pressure display (4), which has relatively high frequency of being removed, is connected to a base block (5) at the lower section with a male screw member (17) from above. An open/close valve (6), which has relatively low frequency of being removed, has an integrally arranged block-like main body (6a) at the lower section. The main body (6a) of the open/close valve (6) is connected to the base block (5) with a male screw member (18) from the front-rear direction.</p>
申请公布号
WO2008149702(A1)
申请公布日期
2008.12.11
申请号
WO2008JP59628
申请日期
2008.05.26
申请人
TOKYO ELECTRON LIMITED;FUJIKIN INCORPORATED;OKASE, WATARU;MORIYA, SHUJI;NAKATA, TOMOHIRO;SHINOHARA, TSUTOMU;YAMAJI, MICHIO