| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To provide a laser beam machining system which can prevent temperature drift to a work at an irradiation position of a laser beam. <P>SOLUTION: A case 11 accommodates therein a laser beam source 12, and an optical scanning means M comprising a galvano-mirror 13, a deflection mechanism 14 and a galvano-motor 15. The galvano-motor 15 is connected to a driving circuitry 26. An aging control portion 43 and a laser beam irradiation suspending portion 44 are provided at a control portion 22 of a controller 21 in the case 11. Before marking (machining) operation to the work, the laser beam source 12 is suspended, the driving circuitry 26 is driven by a control signal from the aging control portion 43, the optical scanning means M is aged, and a temperature of the optical scanning means M is risen to a proper temperature beforehand. <P>COPYRIGHT: (C)2009,JPO&INPIT</p> |
