METHOD FOR MANUFACTURING A SINGLE-CRYSTAL FILM, AND INTEGRATED OPTICAL DEVICE COMPRISING SUCH A SINGLE-CRYSTAL FILM

摘要

The invention relates to a method for manufacturing a single-crystal film, e.g. a metal oxide or organic crystal film, based on the known ion slicing technology. In a first step, ions are implanted into a donor crystal structure to form a damage layer within the crystal structure at an implantation depth below a top surface of the crystal structure, the top surface and said damage layer defining at least in part the single- crystal film to be detached from the crystal structure. Thereafter, the crystal structure is indirectly bonded to a substrate by a bonding layer between the crystal structure and the substrate, this bonding layer comprising a polymer adhesive. After curing the polymer, the laminate is exposed to a temperature increase to effect detachment of the single-crystal film from the crystal structure. The invention has the advantage of less stringent requirements for surface smoothness and flatness. Therefore, it enables a very reproducible fabrication of high-quality and large area thin films, e.g. of a metal oxide (e.g. ferroelectric) or organic crystal.