Sensor zur Verwendung in einer lithografischen Vorrichtung,申请号DE200660000357T-传众专利搜索

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发明名称	Sensor zur Verwendung in einer lithografischen Vorrichtung
摘要
申请公布号	DE602006000357(T2)	申请公布日期	2008.12.11
申请号	DE200660000357T	申请日期	2006.02.17
申请人	ASML NETHERLANDS B.V.	发明人	KOK, HAICO VICTOR;VAN DE KERKHOF, MARCUS ADRIANUS;KRUIZINGA, BORGERT;SENGERS, TIMOTHEUS FRANCISCUS;MOEST, BEARRACH;HAAST, MARC ANTONIUS MARIA;WEISSBRODT, PETER WERNER;SCHRENK, MANFRED HELMUT GUSTAV WILHELM JOHANN;HARZENDORF, TORSTEN
分类号	G03F7/20	主分类号	G03F7/20
代理机构		代理人
主权项
地址

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