A sheet plasma film forming apparatus (100) is provided with a plasma generating section (81) for generating columnar plasma inside; a deforming section (83) for deforming the columnar plasma into sheet-like plasma (27); a flat sheet plasma path (86) for permitting the sheet plasma to flow through; a target storing section (85) formed on one main surface of the sheet plasma path (86); a base material storing section (87) formed on the other main surface of the sheet plasma path (86), and an anode section (89). The height dimension of the sheet plasma path (86) excluding portions where the target storing section (85) and the base material storing section (87) are formed is larger than the thickness of a visible portion of the sheet plasma flowing through but smaller than the width of the visible portion.