| 摘要 |
Disclosed is a turbo-molecular pump, which comprises: a blade pumping section having a plurality of rotor blades and a plurality of stator blades which are alternately arranged in plural stages along an axial direction of the pump; and a thread groove pumping section having a cylindrical-shaped screw stator, and a rotor cylinder adapted to be rotated inside the screw stator. The rotor cylinder has a lower edge surface located on an upstream side relative to a downstream edge of the screw stator with respect to the axial direction. The turbo-molecular pump of the present invention can minimize flying-out of broken pieces of the rotor cylinder from a discharge port. |
