SENSOR, PROGRAM STORAGE UNIT, CONTROL UNIT, AND PROGRAM STORAGE MEDIUM

摘要

At a time of a teaching mode that is performed before conditions of a flow path where fluid flows, a pressure and a flow rate of the fluid are sampled. Also at a time of a detection mode to detect the conditions of the flow path, the pressure and the flow rate are sampled. Then, in a case where a difference between the flow rate in the teaching mode in the pressure obtained in the detection mode and the flow rate in the detection mode is larger than a predetermined value, it is determined that clogging has been caused in the flow path. A processing program for this case is selectively transmitted in advance from a processing program storage device 50 that stores a plurality of processing programs to the sensor 30.