SEMICONDUCTOR INSPECTING APPARATUS AND CONTROL METHOD THEREOF

摘要

An apparatus for an inspection of semiconductor is provided to reduce the cost of the apparatus for inspection of semiconductor by operating the load cell which is set up in the transport unit not in the test board or tray. An apparatus for an inspection of semiconductor comprises a plurality of transport units(110), a plurality of load cells, and the controller. The transport unit is connected to a plurality of spots of the plate. The transport unit moves the plate to the test board and adheres the semiconductor integrated circuit package positioned between the plate and test board closely to the test board. The load cell is installed at a plurality of transport units. The controller outputs the transfer distances of transport unit which is needed for adhering the semiconductor integrated circuit package closely to the test board based on the load which is measured by a plurality of load cells. The controller controls the power of each transport unit in order to move the plate as the transfer distance which is calculated by the controller.