发明名称 |
Halogenated anti-reflective coatings |
摘要 |
<p>Anti-reflective coatings formed from polymers and having high etch rates are provided. Broadly, the coatings are formed from a polymer binder and a light attenuating compound. The polymer binder has halogen atoms bonded thereto, preferably to functional groups on the polymer binder rather than to the polymer backbone. Preferred polymer binders comprise acrylic polymers while it is preferred that the halogenated functional groups of the polymer binders be dihalogenated, and more preferably trihalogenated, with chlorine, fluorine, or bromine atoms.</p> |
申请公布号 |
EP2000852(A1) |
申请公布日期 |
2008.12.10 |
申请号 |
EP20080015849 |
申请日期 |
2002.02.11 |
申请人 |
BREWER SCIENCE, INC. |
发明人 |
ENOMOTO, TOMOYUKI;MIZUSAWA, KEN-ICHI;ARASE, SHIN-YA;PULIGADDA, RAMA |
分类号 |
G03F7/004;G03F7/11;C08F18/00;C08F18/16;C08F220/12;C08F220/22;C08F220/28;C09D133/16;G03F7/038;G03F7/09;G03F7/26;G03F7/40;H01L21/027 |
主分类号 |
G03F7/004 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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