| 摘要 |
<p>A vacuum pressure control system is provided to maintain the injected gas at the exact vacuum pressure value and to exhaust the gas quickly out of the vacuum container. A vacuum pressure control system comprises a vacuum container, a vacuum pump taking in the gas in the vacuum container, a vacuum on off valve which diversifies opening and controls the vacuum pressure in the vacuum container by the fluid supplied in the fluid source, an apparatus for controlling the vacuum pressure controlling the vacuum on off valve, a servo valve controlling the opening of the vacuum on off valve.</p> |
