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发明名称
Monitoring pattern and method of forming the monitoring pattern in semiconductor device
摘要
申请公布号
KR100871756(B1)
申请公布日期
2008.12.05
申请号
KR20060136979
申请日期
2006.12.28
申请人
发明人
分类号
H01L21/28;H01L21/66
主分类号
H01L21/28
代理机构
代理人
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