| 摘要 |
<p>A copolymer having an isocyanate-based derivative, its preparation method, and an organic antireflective coating composition containing the copolymer are provided to improve adhesive force and cross-linking performance and to prevent the diffuse reflection from an underlayer in case of short wavelength exposure process. A copolymer having an isocyanate-based derivative contains a pyrazole group-protected isocyanate-based derivative represented by the formula 1 and a structural unit represented by the formula 4 as a monomer, and has a weight average molecular weight of 5,000-100,000, wherein R and R1 are independently H, a C1-C10 alkyl group, a C1-C10 alkoxyalkyl group or a C1-C10 hydroxyalkyl group; R3 is H, a C1-C6 alkyl group, a C1-C6 alkoxyalkyl group, a C1-C6 hydroxyalkyl group or a C1-C6 halogenated alkyl group; R4 is H or a methyl group; and R6 is H or a methyl group.</p> |
