发明名称 THE WAFER TOGGLE ROLLER COMBINATION STRUCTURE
摘要 The wafer toggle roller coupling structure is provided to prevent the defect of wafer and to improve the product quality by fixing the toggle roller connection unit to the main body. The wafer toggle roller coupling structure comprises the main body(2) and the toggle roller(1). The main body is connected to the sliding block. The toggle roller connection unit(4) is fixed at the upper part of the main body and stops or rotates to clean the wafer. The toggle roller connection unit has one or more fixation pin(3) at the upper part of the main body. The toggle roller connection unit is the dual structure composed of different resin of the hard and soft material. The toggle roller connector is inserted in the bottom part with the fixation pin. The coupling groove is to hold the wafer and to prevent the breakaway of wafer. The lock groove(41b) is formed to be broken away the fixation pin in an insertion state.
申请公布号 KR100872267(B1) 申请公布日期 2008.12.05
申请号 KR20070073356 申请日期 2007.07.23
申请人 WILL BE S & T CO., LTD. 发明人 KANG, EUN YOUNG;LEE, SANG MAN;KU, KANG HEE;PARK, MYOUNG SOO
分类号 H01L21/304 主分类号 H01L21/304
代理机构 代理人
主权项
地址