| 摘要 |
PROBLEM TO BE SOLVED: To provide a floating matter collector capable of inhibiting attaching of floating matters on parts, other than the collecting part of a collecting material. SOLUTION: This floating matter collector 20 is to collect the floating matters contained in gas on the collecting part 12 of the collecting material 10, and is equipped with a spraying part 21 to spray the floating matters on the collecting part 12 of the collecting material 10, a wall part 22 making a contact with the collecting material 10 so as to surround the collecting part 12, and an exhausting part 23 for exhausting the gas sprayed on the collecting part 12. COPYRIGHT: (C)2009,JPO&INPIT
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