| 摘要 |
A method for recycling a used sputtering target is provided, including the steps of: (1) cleaning, (2) pulverization, (3) dissolution, (4) filtering, (5) peptization, (6) neutralization and precipitation, (7) rinsing and filtering, (8) drying, and (9) calcination; through the steps above, which can then be recycling used sputtering target to recover the constituent components of the ITO targets.
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