发明名称 Method and Device for Analysing the Imaging Behavior of an Optical Imaging Element
摘要 The invention relates to a method for analyzing the imaging behavior of a first optical imaging element, whereby an object is imaged into an image plane by a second optical imaging element and light in the image plane is detected in a spatially resolved manner, the two optical imaging elements differing in terms of at least one imaging characteristic. Values are determined for the intensity and for at least one second characteristic of the light, said values being then stored in image points, and processed in an emulation step. An emulation image is produced, emulating the imaging of the object by the first optical imaging element, taking into account the influence of the second characteristic. A series of images is produced by dividing a range of values of the second characteristic into subdomains, associating an image with each subdomain, and associating the corresponding intensity value with the image points of each image, in case the value of the second characteristic, associated with the image point, falls in the subdomain associated with the respective image. Otherwise, a pre-determined intensity value is associated therewith. The series of images is converted into a series of intermediate images in the emulation step. A constant value of the second characteristic is used in the emulation for each intermediate image, said value originating from the respective subdomain and differing from the values of the second characteristic for the other intermediate images. The intermediate images are then combined to form an emulation image.
申请公布号 US2008297775(A1) 申请公布日期 2008.12.04
申请号 US20060158403 申请日期 2006.12.15
申请人 CARL ZEISS SMS GMBH 发明人 GREIF-WUSTENBECKER JORN;STROSSNER ULRICH
分类号 G01B9/00;G01B11/00 主分类号 G01B9/00
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