| 摘要 |
PROBLEM TO BE SOLVED: To provide a confocal optical device and its method, which accurately measures a position of a measuring object while considering an influence by spherical aberration of a lens. SOLUTION: This confocal optical device 1 calculates a height of a measuring object on the basis of the distribution of detected data in accompany with the movement obtained by detecting the reflected light from the measuring object by a detector while successively relatively moving a focusing position of the light to the measuring object in the optical axis direction while applying the light to the measuring object. The confocal optical device 1 comprises: a first storing means 3 for storing the distribution of the detected data in accompany with the movement; a curve approximation means 5 for approximating the distribution of the detected data stored in the first storing means 3 with a free curve; and a calculating means 2 for calculating the height of the measuring object on the basis of a position of an apex of the approximated free curve. COPYRIGHT: (C)2009,JPO&INPIT
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