| 摘要 |
<p>A plurality of reference holes are formed on a surface of a first substrate made of a first material, and a plurality of columnar members are fitted in the reference holes, respectively, so that at least a part of each columnar member protrudes from the surface of the first substrate. Then, on the surface of the first substrate, an electrode surface layer made of a second material is formed so that each end portion of the columnar member is exposed from the surface, and then the columnar members are removed. Thus, a substrate-like electrode, which has at least an electrode surface layer provided with a through hole having a cross-section that corresponds to the cross-section shape of the protruding portion of the columnar member, is provided.</p> |
