NANO-RESONATOR USING BEAM WITH COMPOSITE STRUCTURE

摘要

A nano-resonator using beam with composite structure is provided to supply sufficient resonance at quasi-resonant condition without a magnetic line induced from super-conduction. In a nano-resonator using beam with composite structure, a support layer(213), having a sandwich structure while having low density, is deposited on the silicon carbide resonator(211). A sacrificial layer(212) is used for the bond of two layers having capable of enduring the high frequency resonance, and a support layer(213) is composed of mental having low density. A beam of the composite structure includes the silicon carbide beam, the metallic conductor of the low density evaporated on the sacrificial layer and the sacrificial layer evaporated on the silicon carbide beam.