| 摘要 |
PROBLEM TO BE SOLVED: To provide a film-forming apparatus which can form an adequate DLC film, and a film-forming method therewith. SOLUTION: Macroparticles generated in a plasma-generating unit include a solid macroparticle other than a liquid splash referred to as a droplet. Even though the solid macroparticles collide against the inner face of a curved portion, they hardly adhere thereto, but are reflected on the inner face to be directed toward a substrate 11. However, a filter sheet 5 having a porous film provided on its surface is provided in between the curved portion and a chamber 6, and accordingly makes the solid macroparticles having moved toward the substrate 11 enter into the void in the porous film, and repeatedly collide against the wall of the inner part. As a result, many solid macroparticles lose their kinetic energy, are captured by the porous film, and cannot reach the substrate 11. COPYRIGHT: (C)2009,JPO&INPIT
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