| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a surface acoustic wave actuator which makes it possible to excite a surface acoustic wave easily by reducing considerably the manufacturing variations and the effect of temperature characteristics of an interdigital electrode with a simple configuration, and to achieve the improvement in cost reduction and user-friendliness. <P>SOLUTION: A surface acoustic wave actuator 1 includes a fixed element consisting of a piezoelectric substrate 2 in which an interdigital electrode 4 for exciting a surface acoustic wave W is formed, a moving element 3 which is driven by the surface acoustic wave W excited by the interdigital electrode 4 on the piezoelectric substrate 2, an oscillation circuit 6 for exciting the surface acoustic wave W, wherein the oscillation circuit 6 includes the interdigital electrode 4 and an amplifier 5 to amplify the current flowing in this interdigital electrode 4. The oscillation circuit 6 can oscillate easily at the resonant frequency of the interdigital electrode 4. It can excite the surface acoustic wave W by self excitation, and can reduce considerably the manufacturing variations and the effect of temperature characteristics, being different from a conventional case in which the excitation is carried out by determining the excitation frequency with an external high frequency power source. <P>COPYRIGHT: (C)2009,JPO&INPIT |
