发明名称 OZONE SOLUTION TREATMENT METHOD OF RESIN SUBSTRATE, AND WIRING BOARD MANUFACTURING METHOD
摘要 PROBLEM TO BE SOLVED: To maintain the surface smoothness of a resin substrate, to achieve high and uniform deposition strength of a plated film, and to shorten the ozone treatment time. SOLUTION: A resin substrate is treated with a first ozone solution having the high activation rate, and after that, the resin substrate is treated with a second ozone solution having the activation rate lower than that of the first ozone solution. The first ozone solution easily erodes the resin substrate, and easily forms a modifying layer even when organic stain is deposited on its surface. By the subsequent treatment with the second ozone solution, unevenness is averaged, the surface smoothness is enhanced, and variance of local erosion is averaged thereby. COPYRIGHT: (C)2009,JPO&INPIT
申请公布号 JP2008291288(A) 申请公布日期 2008.12.04
申请号 JP20070135747 申请日期 2007.05.22
申请人 TOYOTA MOTOR CORP;TOYOTA INDUSTRIES CORP 发明人 BESSHO TAKESHI;KUMAGAI KYOKO;YOSHIDA TAKASHI;NAGAMURA MANABU;SHIMO TOSHIHISA
分类号 C23C18/30;H05K3/18 主分类号 C23C18/30
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