KARTIERUNG EINES OBERFLÄCHENPROFILS

摘要

The invention refers to an apparatus for mapping a surface profile of a surface of an object, by which the apparatus yields slope data. The slope data of the apparatus may comprise measurement errors, which according to the invention shall be detected and corrected for. It is suggested that a computational entity calculates for all measurement values the curl of the slope data for determining surface locations at which the measurement values exhibit measurement errors. In a second step the proposal is given with which the measurement values can be corrected.