MANUFACTURING APPARATUS AND MANUFACTURING METHOD OF LIGHT-EMITTING DEVICE

摘要

A manufacturing device is provided to reduce manufacturing cost of by improving the efficiency of EL materials and include a deposition apparatus which is one of manufacturing devices in which uniformity or the throughput of the electric luminance layer deposition is excellent in case making a full-color flat panel display using the emitted light color of red, green and blue. A manufacturing device comprises: a light-generating unit injecting the laser light; a optical system transferring a laser light into the laser beam of a rectangular or line-like shape; a light control unit selectively shielding or reflecting the laser beam of the rectangular or line-like shape; a scanning unit scanning a light absorption layer provided to a irradiated substrate by the laser beam passing through the light control unit; and a alignment unit performing align of the light control unit, the irradiated substrate(101) and the film-forming substrate.