发明名称 ELECTRODE, ELECTRONIC DEVICE, FIELD EFFECT TRANSISTOR, METHOD FOR MANUFACTURING THE SAME AND METHOD FOR GROWING CARBON NANO TUBE
摘要 <p>An electrode, an electric component, a field effect transistor, a manufacturing method thereof and the carbon nanotube growth process are provided to form the thin catalyst at the desired location of the electrode near side. An electrode(10) comprises the transparent electrode layer(12), the opaque electrode layer(14), and the catalyst(16). The opaque electrode layer exists on the transparent electrode layer. The catalyst exists on the open side(15) on the transparent electrode layer which is not covered by the opaque electrode layer. The carbon nanotube is grown horizontally from the catalyst.</p>
申请公布号 KR20080105338(A) 申请公布日期 2008.12.04
申请号 KR20070052802 申请日期 2007.05.30
申请人 SAMSUNG ELECTRONICS CO., LTD. 发明人 CHOI, JUN HEE;ZOULKARNEEV ANDREI
分类号 H01L21/283;H01L29/78 主分类号 H01L21/283
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