RATE-OF-ROTATION SENSOR HAVING A COUPLING BAR

摘要

The sensor has a substrate (2) comprising a surface area that is aligned parallel to a plane of a Cartesian coordinate system. Two base units are provided, where each unit has a closed frame (8), and a torsion spring (41) that is suspended on the frame. Seismic masses (3-6) are suspended on the torsion spring and the frame, and the torsion spring is formed in such a manner that the spring permits torsion deflections of the seismic masses around a specific axis. The base units are coupled with each other by a coupling bar (12). An independent claim is also included for a method for manufacturing a rotational speed sensor.