摘要 |
A gas processing unit is provided to manage rapidly manage although the malfunction of the electrical machinery and apparatus including a blower or a heater etc.. A gas processing unit installed at the heat treatment unit heat-treating the heat treated material comprises a thermal processing chamber(11) which can be put in and outs, accommodates the heat treated material; a respective gas entry site(12) communicating and gas taking out portion(13) are included in the thermal processing chamber; a first connection units(14, 25) are interposed in the gas entry site and the attachably and detachably connected induction duct(22) is included; a second connection units(15, 26) are interposed in the gas taking out portion and the attachably and detachably connected derivation duct(23) is included; a gas path(21A) it introduces the gas for the thermal process to the gas entry site, for drawing the gas from the gas taking out portion; a catalyst(30) for separating the sublimate included in the gas which is generated from the heat treated material and is drawn from the gas taking out portion; a heater(31) heating up catalyst; and blowers(32) the gas for the thermal process and the gas which is drawn from the gas taking out portion is induced to the prescribed direction. |