| 摘要 |
A substrate support for supporting a substrate 14 to be processed in a vacuum processing chamber comprises: a frame 2a, 2b, 2c, 2d for carrying said substrate 14; and at least a first fastening means fixedly attached to said frame 2a, 2b, 2c, 2d for aligning said substrate 14 relative to said frame 2a, 2b, 2c, 2d by attaching said substrate 14 to said first fastening means. The substrate support further comprises at least a second fastening means 12, 13 movably attached to said frame 2a, 2b, 2c, 2d, said second fastening means 12, 13 being movable relative to said frame 2a, 2b, 2c, 2d and/or movable relative to said substrate 14 attached to said first fastening means in a direction at least towards and/or away from and edge 14' of said substrate 14 attached to said first fastening means. Furthermore, a coating chamber comprises an edge exclusion projecting over portion of the surface ofa substrate supported by a carrier and received in the coating chamber in order to prevent processing of a portion of the substrate surface. A part of the edge exclusion may be moved into a gap 19 between the edge(s) 14' of the substrate 14 and the frame 2a, 2b, 2c, 2d of the substrate support to form a labyrinth seal between the frame element 2a, 2b, 2c, 2d and the edge 14' of the substrate 14. A method of placing a substrate 14 on a substrate support comprises the steps of: a) providing at least a first fastening means fixedly attached to a frame 2a, 2b, 2c, 2d of the substrate support, and a second fastening means 12, 13 movably attached to said frame 2a, 2b, 2c, 2d, said second fastening means 12, 13 being movable relative to said frame; b) moving said second fastening means 12, 13 in an outward direction to increase the space defined by the position of said first fastening means and said second fastening means 12, 13; c) attaching said substrate 14 to said first fastening means; d) moving said second fastening means 12, 13 in an inward direction towards an edge 14' of said substrate 14 attached to said first fastening means; and e) attaching said substrate 14 to said second fastening means 12, 13. |
