发明名称 |
Method of making an X-Y axis dual-mass tuning fork gyroscope with vertically integrated electronics and wafer-scale hermetic packaging |
摘要 |
A dual-axis sensor for measuring X and Y components of angular velocity in an X-Y sensor plane is provided. The dual-axis sensor includes a first subsensor for measuring the X component of angular velocity, and a second subsensor for measuring the Y component of angular velocity. The first subsensor and the second subsensor are contained within a single hermetic seal within the dual-axis sensor.
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申请公布号 |
US7458263(B2) |
申请公布日期 |
2008.12.02 |
申请号 |
US20050283083 |
申请日期 |
2005.11.18 |
申请人 |
INVENSENSE INC. |
发明人 |
NASIRI STEVEN S.;SEEGER JOSEPH;LIM MARTIN;FLANNERY, JR. ANTHONY FRANCIS;CASTRO ALEXANDER |
分类号 |
G01C19/00;G01C19/56;G01P1/02;G01P9/04 |
主分类号 |
G01C19/00 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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