CERAMIC FILM, LIGHT EMITTING ELEMENT AND PRODUCTION METHOD OF CERAMIC FILM

摘要

PROBLEM TO BE SOLVED: To provide a low resistant ceramic film and its production method. SOLUTION: The ceramic film whose crystal structure is mainly a hexagonal metal compound phase and where equation X/Y≥1 (wherein X is the maximum value of X-ray diffraction strength in any one of crystal surfaces being orthogonal to the (a) axis of the ceramic film; and Y is the X-ray diffraction strength of the ceramic film in the same crystal surface as a crystal surface where the X-ray diffraction strength of powders consisting of a metal compound is maximum) is satisfied is formed on a body to be film-formed where an aerosol formed by mixing metal compound powders containing columnar particles whose aspect ratio is in the range of 2-7 of 5-30% in number ratio with a gas is injected from a nozzle to the body to be film-formed under a reduced atmosphere. COPYRIGHT: (C)2009,JPO&INPIT