CAPACITIVE MICROMACHINED ULTRASONIC TRANSDUCER (cMUT) DEVICE AND IN-BODY-CAVITY DIAGNOSTIC ULTRASOUND SYSTEM

摘要

A capacitive micromachined ultrasonic transducer (cMUT) device, comprises: a cMUT obtained by processing a silicon substrate by using a silicon micromachining technique; and an oscillator circuit having the cMUT as a capacitor, and outputting a frequency modulation signal by modulating a frequency of an oscillation signal to be output on the basis of a change of capacitance of the cMUT.