METHOD AND APPARATUS FOR MODIFYING BOTH SURFACE OF ORGANIC SUBSTRATES

摘要

A method and an apparatus for modifying both surface of organic substrates are provided to put plural organic substrates into a treatment tube which includes a solution for photo-catalyst distribution surface treatment and to irradiate beams on the both surfaces of the organic substrates in order to continuously treat both surfaces of an organic substrate. A loader(100) receives plural glass substrates before the surface treatment, and a substrate treatment tube receives a solution(21) for photo-catalyst distribution surface treatment. Energy light irradiating units is placed at both of the substrate treatment tube, and an un-loader(300) receives plural substrates(3) conveyed from the tube after the surface treatment. A transferring unit(400) transfers the glass substrates from the loader to un-loader via the substrate treatment tube, and holding units(41,42) holds the glass substrates.