SUBSTRATE LAMINATING DEVICE AND SUBSTRATE LAMINATING METHOD

摘要

PROBLEM TO BE SOLVED: To provide a substrate laminating device for preventing degradation of lamination accuracy. SOLUTION: The substrate laminating device 1 is equipped with: a vacuum chamber 2; a first substrate holder 3 placed in the vacuum chamber 2 and holding a first substrate K1; a second substrate holder 4 placed in the vacuum chamber 2 and holding a second substrate K2 facing the first substrate K1; a moving mechanism 5 relatively moving the first substrate holder 3 and the second substrate holder 4 in directions close to and away from each other; a pressure reducing unit 6 to reduce the pressure in the vacuum chamber 2; first pressure detectors 9a, 9b detecting a first pressure of the atmosphere in the vacuum chamber 2; a second pressure detector 10b detecting a second pressure of a gas remaining between a holding face M2 holding the second substrate K2 on the surface of the second substrate holder 4 and the second substrate K2; and a control means to control the pressure reducing unit 6 to suppress deformation of the second substrate k2 in accordance with the pressure difference between the detected first pressure and the second pressure. COPYRIGHT: (C)2009,JPO&INPIT