| 摘要 |
PROBLEM TO BE SOLVED: To provide a substrate processing apparatus of high energy efficiency excellent in temperature control accuracy of object of temperature control, and a temperature controlling device used for this substrate processing apparatus. SOLUTION: A part of a first flow passage 16 which circulates a first temperature controlling fluid 15 for controlling temperature of an object of temperature control passes trough a substrate processing part. A second temperature controlling fluid 18 which exchanges heat with the first temperature controlling fluid 15 flows a second flow passage 19. A circulation passage of the first temperature controlling fluid composed of an upper flow passage 16a, a part of the flow passage, a lower flow passage 16b and a bypass 366 is switched by a switching device to a circulation passage of the first temperature controlling fluid composed of the upper flow passage 16a, a part of flow passage, the lower flow passage 16b and a heat exchanging passage 39a. COPYRIGHT: (C)2009,JPO&INPIT
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